IC Knowledge's Cost Modeling of Semiconductor Manufacturing Shows Fully Depleted Silicon-on-Insulator Technology to be the Most Cost-effective Approach at the 22nm Node
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Posted on July 12, 2011 at 1:56:01 PM
IC Knowledge's Cost Modeling of Semiconductor Manufacturing Shows Fully Depleted Silicon-on-Insulator Technology to be the Most Cost-effective Approach at the 22nm Node
GEORGETOWN, Massachusetts, July 12, 2011/PRNewswire/ --
- FD-SOI Determined to Be More Economical Than Planar Bulk Silicon CMOS
Processing
Research firm IC Knowledge LLC has completed a comprehensive cost
analysis that determines fully depleted silicon-on-insulator (FD-SOI) wafers
offer the global semiconductor industry the most cost effective solution
compared to bulk silicon for processing semiconductor devices at the
next-generation 22 nm technology node and beyond.
"FD-SOI offers the potential for significant process simplification,
making it cost competitive while simultaneously offering performance
improvements over bulk silicon," said Scotten W. Jones, president of IC
Knowledge. "The ability to use fewer steps enables FD-SOI's greater cost
efficiency."
In particular, FD-SOI processing dramatically decreases the number of
implant masks and implant steps needed. Although implant-related costs are
relatively low, FD-SOI's fewer total processing steps offers a simpler
overall process flow.
"Fully depleted SOI is the key," Jones added.
In conducting its analysis, IC Knowledge worked with a wafer-processing
consultant and Soitec, the world leader in SOI wafer manufacturing, to
define three sample process flows representative of state-of-the-art
industry practices for the 22 nm node: one planar bulk CMOS and two versions
of FD-SOI - with implanted source/drain or with in-situ doped source/drain.
All process flows assumed three threshold voltages, dual gate oxides and
suitability for system-on-a-chip (SOC) applications. The bulk CMOS process
assumed a suite of mobility-enhancing stressors. The two FD-SOI process
flows, on top of relevant mobility-enhancing stressors, also assumed
multiple features such as n+ and p+ back-gates and n-well and p-well
implants under the buried oxide (BOx) layer, access to the n-well and
p-well, two shallow-trench isolation depths and electro-static discharge
(ESD) devices in a bulk area. The same gate integration schemes (gate-last
high-k metal gate) and number of metal layers (eight) were assumed in all
scenarios. For SOI, a volume pricing of $500 per starting wafer was added.
For bulk silicon, an aggressive price of $130 per (epi) starting wafer was
selected.
IC Knowledge then utilized its Strategic Cost Model to evaluate how each
process flow would perform in a Taiwanese wafer fab producing 30,000 wafers
per month in the 2012 timeframe. The scenario generator considered the costs
of starting wafers, direct and in-direct labor, depreciation of the wafer
fab, equipment maintenance, monitor wafers, facilities such as electricity,
and consumables such as reticle sets, gases and chemicals. Calculations of
the cost per wafer yielded used in the model have been validated by IC
Knowledge using wafer cost data collected from fabs throughout the
semiconductor industry.
The Strategic Cost Model's analysis determined that the most economical
yielded-wafer cost was achieved by FD-SOI processing with in-situ doped
source/drain, at approximately $3,000 per wafer. Furthermore, both versions
of FD-SOI were determined to be extremely cost competitive compared to bulk
CMOS. The study found only about one percent difference in the cost of
yielded processed wafers produced by the second FD-SOI option - with
implanted source/drain - and bulk CMOS.
Because this analysis is strictly based on costs, IC Knowledge's
findings do not address FD-SOI's superiority to bulk silicon in producing
semiconductors with lower leakage and faster processing speeds or compare
the performance of SOI and bulk silicon in processing multi-gate transistors
at the 22 nm node and beyond.
The report is available on:
http://www.icknowledge.com/misc_technology/SoitecReport20110709.pdf
About IC Knowledge:
IC Knowledge is the world leader in cost modeling for the semiconductor
and MEMS industries. In addition to custom projects IC Knowledge offers a
variety of cost modeling tools as well as reports, databases and forecasts.
IC Knowledge's customers include leading semiconductor and MEMS companies,
OEMs, fabless design houses, system manufacturers, industry analysts and
many others. For more information please visit
http://www.icknowledge.com .
Media Contact:
Scotten W. Jones
President
IC Knowledge LLC
Ph: +1(978)352 - 7610
sjones@icknowledge.com
Source: IC Knowledge
.
GEORGETOWN, Massachusetts, July 12, 2011/PRNewswire/ --
- FD-SOI Determined to Be More Economical Than Planar Bulk Silicon CMOS
Processing
Research firm IC Knowledge LLC has completed a comprehensive cost
analysis that determines fully depleted silicon-on-insulator (FD-SOI) wafers
offer the global semiconductor industry the most cost effective solution
compared to bulk silicon for processing semiconductor devices at the
next-generation 22 nm technology node and beyond.
"FD-SOI offers the potential for significant process simplification,
making it cost competitive while simultaneously offering performance
improvements over bulk silicon," said Scotten W. Jones, president of IC
Knowledge. "The ability to use fewer steps enables FD-SOI's greater cost
efficiency."
In particular, FD-SOI processing dramatically decreases the number of
implant masks and implant steps needed. Although implant-related costs are
relatively low, FD-SOI's fewer total processing steps offers a simpler
overall process flow.
"Fully depleted SOI is the key," Jones added.
In conducting its analysis, IC Knowledge worked with a wafer-processing
consultant and Soitec, the world leader in SOI wafer manufacturing, to
define three sample process flows representative of state-of-the-art
industry practices for the 22 nm node: one planar bulk CMOS and two versions
of FD-SOI - with implanted source/drain or with in-situ doped source/drain.
All process flows assumed three threshold voltages, dual gate oxides and
suitability for system-on-a-chip (SOC) applications. The bulk CMOS process
assumed a suite of mobility-enhancing stressors. The two FD-SOI process
flows, on top of relevant mobility-enhancing stressors, also assumed
multiple features such as n+ and p+ back-gates and n-well and p-well
implants under the buried oxide (BOx) layer, access to the n-well and
p-well, two shallow-trench isolation depths and electro-static discharge
(ESD) devices in a bulk area. The same gate integration schemes (gate-last
high-k metal gate) and number of metal layers (eight) were assumed in all
scenarios. For SOI, a volume pricing of $500 per starting wafer was added.
For bulk silicon, an aggressive price of $130 per (epi) starting wafer was
selected.
IC Knowledge then utilized its Strategic Cost Model to evaluate how each
process flow would perform in a Taiwanese wafer fab producing 30,000 wafers
per month in the 2012 timeframe. The scenario generator considered the costs
of starting wafers, direct and in-direct labor, depreciation of the wafer
fab, equipment maintenance, monitor wafers, facilities such as electricity,
and consumables such as reticle sets, gases and chemicals. Calculations of
the cost per wafer yielded used in the model have been validated by IC
Knowledge using wafer cost data collected from fabs throughout the
semiconductor industry.
The Strategic Cost Model's analysis determined that the most economical
yielded-wafer cost was achieved by FD-SOI processing with in-situ doped
source/drain, at approximately $3,000 per wafer. Furthermore, both versions
of FD-SOI were determined to be extremely cost competitive compared to bulk
CMOS. The study found only about one percent difference in the cost of
yielded processed wafers produced by the second FD-SOI option - with
implanted source/drain - and bulk CMOS.
Because this analysis is strictly based on costs, IC Knowledge's
findings do not address FD-SOI's superiority to bulk silicon in producing
semiconductors with lower leakage and faster processing speeds or compare
the performance of SOI and bulk silicon in processing multi-gate transistors
at the 22 nm node and beyond.
The report is available on:
http://www.icknowledge.com/misc_technology/SoitecReport20110709.pdf
About IC Knowledge:
IC Knowledge is the world leader in cost modeling for the semiconductor
and MEMS industries. In addition to custom projects IC Knowledge offers a
variety of cost modeling tools as well as reports, databases and forecasts.
IC Knowledge's customers include leading semiconductor and MEMS companies,
OEMs, fabless design houses, system manufacturers, industry analysts and
many others. For more information please visit
http://www.icknowledge.com .
Media Contact:
Scotten W. Jones
President
IC Knowledge LLC
Ph: +1(978)352 - 7610
sjones@icknowledge.com
Source: IC Knowledge
.