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Multiple Foundries in Asia Select Jordan Valley's JVX7300HR X-ray Metrology Tool
MIGDAL HAEMEK, Israel, June 29, 2015 /PRNewswire/ --
Jordan Valley (JV), a leading supplier of X-ray based in-line metrology solutions for
advanced semiconductor manufacturers, today announced that it has received orders for its
latest generation JVX7300HR front-end-of-line (FEOL) strain & thin-film metrology tool
from multiple foundries in Asia.
The innovative JVX7300HR tool provides in-line, first principle metrology for
product-wafers at the 28 nm, and below, technology nodes. The high-resolution X-ray
diffraction (HRXRD) measurement channel provides a unique monitoring capability for
epitaxial materials, such as SiGe, Si:C, Si:P, providing information on strain and
epitaxial quality on both bulk Si and (FD)SOI substrates. Additionally, the X-ray
reflectivity (XRR) channel provides thin-film thickness monitoring for complex stacking
including high-k / metal gate (HKMG) stack analysis
Dr. Alex Tokar, JV's worldwide applications manager explained that JVX7300HR was
developed with the unique challenges that the advanced technology nodes pose. The tool
provides superior performance to its competitors for complex multi-layer epi and HKMG
stacks. High-throughput X-ray metrology provides unique capabilities compared to
traditional optical techniques with improved productivity and hence reduced CoO. The
JVX7300HR provides advanced capabilities such as reciprocal space maps (RSMs) on product
wafers for development and production ramp and hybrid metrology support.
Isaac Mazor, JV's CEO added: "Our unique Fast HRXRD and XRR technologies have been
proven to be crucial for process ramp-up and in-line metrology, especially for epi.
quality monitoring. The JVX7300HR was designed based on our experience gained working in
the fabs of the leading logic players. Our existing customers appreciate our experience in
providing unique X-ray based metrology solutions. Our customers benefit from the JVX7300
from faster process ramp-up and control with a lower cost of measurement."
About the JVX7300HR production metrology tool
The JVX7300HR is a production worthy X-ray metrology tool combining XRR and HRXRD
channels. The tool targets FEOL applications for the 28nm technology node and below. The
JVX7300HR supersedes the JVX7200HR (Best-of-West 2010 award winner)
Jordan Valley's management will attend Semicon West in San Francisco on July 14-16,
2015. To schedule a meeting, please contact sales@jvsemi.com
About Jordan Valley Semiconductors Ltd. .
Jordan Valley Semiconductors (JVS), the leader in X-ray metrology and crystalline defect
detection tools for the semiconductor industry. Jordan Valley's tools are fully automated
non-contacting and non-destructive tools designed for production control on patterned or
blanket wafers.
The company offers the semiconductor industry the most comprehensive portfolio of advanced
metrology and defect inspection tools, based on X-ray technologies such as XRR (X-ray
reflectometry), XRF (X-ray fluorescence), XRD (X-ray diffraction) and others.
Jordan Valley's investors include Clal Industries and Investments Ltd. (TASE: CII), Intel
Capital (NASDAQ: INTC) and Elron Electronics Industries Ltd. (TASE: ELRN). With
headquarters in Migdal Haemek Israel, the company has subsidiaries in Durham UK, Austin TX,
USA, Hsin-Chu Taiwan, Suwon Korea and other offices and sales representatives worldwide.
Â
For more information:Â
Gali AshkenaziÂ
Tel: +972-4654-3666Â
gali.ashkenazi@jordanvalley.comÂ
http://www.jordanvalley.comÂ
Â
Jordan Valley
Multiple Foundries in Asia Select Jordan Valley's JVX7300HR X-ray Metrology Tool
MIGDAL HAEMEK, Israel, June 29, 2015 /PRNewswire/ --
Jordan Valley (JV), a leading supplier of X-ray based in-line metrology solutions for
advanced semiconductor manufacturers, today announced that it has received orders for its
latest generation JVX7300HR front-end-of-line (FEOL) strain & thin-film metrology tool
from multiple foundries in Asia.
The innovative JVX7300HR tool provides in-line, first principle metrology for
product-wafers at the 28 nm, and below, technology nodes. The high-resolution X-ray
diffraction (HRXRD) measurement channel provides a unique monitoring capability for
epitaxial materials, such as SiGe, Si:C, Si:P, providing information on strain and
epitaxial quality on both bulk Si and (FD)SOI substrates. Additionally, the X-ray
reflectivity (XRR) channel provides thin-film thickness monitoring for complex stacking
including high-k / metal gate (HKMG) stack analysis
Dr. Alex Tokar, JV's worldwide applications manager explained that JVX7300HR was
developed with the unique challenges that the advanced technology nodes pose. The tool
provides superior performance to its competitors for complex multi-layer epi and HKMG
stacks. High-throughput X-ray metrology provides unique capabilities compared to
traditional optical techniques with improved productivity and hence reduced CoO. The
JVX7300HR provides advanced capabilities such as reciprocal space maps (RSMs) on product
wafers for development and production ramp and hybrid metrology support.
Isaac Mazor, JV's CEO added: "Our unique Fast HRXRD and XRR technologies have been
proven to be crucial for process ramp-up and in-line metrology, especially for epi.
quality monitoring. The JVX7300HR was designed based on our experience gained working in
the fabs of the leading logic players. Our existing customers appreciate our experience in
providing unique X-ray based metrology solutions. Our customers benefit from the JVX7300
from faster process ramp-up and control with a lower cost of measurement."
About the JVX7300HR production metrology tool
The JVX7300HR is a production worthy X-ray metrology tool combining XRR and HRXRD
channels. The tool targets FEOL applications for the 28nm technology node and below. The
JVX7300HR supersedes the JVX7200HR (Best-of-West 2010 award winner)
Jordan Valley's management will attend Semicon West in San Francisco on July 14-16,
2015. To schedule a meeting, please contact sales@jvsemi.com
About Jordan Valley Semiconductors Ltd. .
Jordan Valley Semiconductors (JVS), the leader in X-ray metrology and crystalline defect
detection tools for the semiconductor industry. Jordan Valley's tools are fully automated
non-contacting and non-destructive tools designed for production control on patterned or
blanket wafers.
The company offers the semiconductor industry the most comprehensive portfolio of advanced
metrology and defect inspection tools, based on X-ray technologies such as XRR (X-ray
reflectometry), XRF (X-ray fluorescence), XRD (X-ray diffraction) and others.
Jordan Valley's investors include Clal Industries and Investments Ltd. (TASE: CII), Intel
Capital (NASDAQ: INTC) and Elron Electronics Industries Ltd. (TASE: ELRN). With
headquarters in Migdal Haemek Israel, the company has subsidiaries in Durham UK, Austin TX,
USA, Hsin-Chu Taiwan, Suwon Korea and other offices and sales representatives worldwide.
Â
For more information:Â
Gali AshkenaziÂ
Tel: +972-4654-3666Â
gali.ashkenazi@jordanvalley.comÂ
http://www.jordanvalley.comÂ
Â
Jordan Valley